Design, Analysis and Control of a Fast Nanopositioning Stage

Yuen Kuan Yong; Sumeet Sunil Aphale; S. O. R.  Moheimani

doi:10.1109/AIM.2008.4601703

Design, Analysis and Control of a Fast Nanopositioning Stage

Yuen Kuan Yong, Sumeet Sunil Aphale, S. O. R. Moheimani

University of Newcastle

Research output: Chapter in Book/Report/Conference proceeding › Published conference contribution

17 Citations (Scopus)

Abstract

We present a fast flexure-based, piezoelectric stack-actuated XY nanopositioning stage which is suitable for high-speed, accurate nanoscale positioning applications. The performance of the design are analyzed using finite-element-analysis software. Experiments demonstrate that the design has a high first resonant mode at 2.7 kHz, a low cross-coupling of -35 dB and a relatively large traveling range of 25x25 mum. These results are in close agreement with the predicted FEA results. Non-linearities due to hysteresis of the piezoelectric stack actuators are present in the stage. The hysteresis effect is minimized using charge actuation. The Integral Resonant Control (IRC) method is applied to damp the first resonant mode. By implementing feedforward inversion technique, high-speed and accurate scanning performances, up to 400 Hz, are achieved.

Original language	English
Title of host publication	Proceedings of the IEEE/ASME Advanced Intelligent Mechatronics Conference, Xi’an, China
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
Pages	451-456
Number of pages	6
DOIs	https://doi.org/10.1109/AIM.2008.4601703
Publication status	Published - 2008

Bibliographical note

Best Paper Award Finalist

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10.1109/AIM.2008.4601703

Cite this

Design, Analysis and Control of a Fast Nanopositioning Stage. / Yong, Yuen Kuan; Aphale, Sumeet Sunil; Moheimani, S. O. R. .
Proceedings of the IEEE/ASME Advanced Intelligent Mechatronics Conference, Xi’an, China. Institute of Electrical and Electronics Engineers (IEEE), 2008. p. 451-456.

Research output: Chapter in Book/Report/Conference proceeding › Published conference contribution

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abstract = "We present a fast flexure-based, piezoelectric stack-actuated XY nanopositioning stage which is suitable for high-speed, accurate nanoscale positioning applications. The performance of the design are analyzed using finite-element-analysis software. Experiments demonstrate that the design has a high first resonant mode at 2.7 kHz, a low cross-coupling of -35 dB and a relatively large traveling range of 25x25 mum. These results are in close agreement with the predicted FEA results. Non-linearities due to hysteresis of the piezoelectric stack actuators are present in the stage. The hysteresis effect is minimized using charge actuation. The Integral Resonant Control (IRC) method is applied to damp the first resonant mode. By implementing feedforward inversion technique, high-speed and accurate scanning performances, up to 400 Hz, are achieved. ",

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PY - 2008

Y1 - 2008

N2 - We present a fast flexure-based, piezoelectric stack-actuated XY nanopositioning stage which is suitable for high-speed, accurate nanoscale positioning applications. The performance of the design are analyzed using finite-element-analysis software. Experiments demonstrate that the design has a high first resonant mode at 2.7 kHz, a low cross-coupling of -35 dB and a relatively large traveling range of 25x25 mum. These results are in close agreement with the predicted FEA results. Non-linearities due to hysteresis of the piezoelectric stack actuators are present in the stage. The hysteresis effect is minimized using charge actuation. The Integral Resonant Control (IRC) method is applied to damp the first resonant mode. By implementing feedforward inversion technique, high-speed and accurate scanning performances, up to 400 Hz, are achieved.

AB - We present a fast flexure-based, piezoelectric stack-actuated XY nanopositioning stage which is suitable for high-speed, accurate nanoscale positioning applications. The performance of the design are analyzed using finite-element-analysis software. Experiments demonstrate that the design has a high first resonant mode at 2.7 kHz, a low cross-coupling of -35 dB and a relatively large traveling range of 25x25 mum. These results are in close agreement with the predicted FEA results. Non-linearities due to hysteresis of the piezoelectric stack actuators are present in the stage. The hysteresis effect is minimized using charge actuation. The Integral Resonant Control (IRC) method is applied to damp the first resonant mode. By implementing feedforward inversion technique, high-speed and accurate scanning performances, up to 400 Hz, are achieved.

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DO - 10.1109/AIM.2008.4601703

M3 - Published conference contribution

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BT - Proceedings of the IEEE/ASME Advanced Intelligent Mechatronics Conference, Xi’an, China

PB - Institute of Electrical and Electronics Engineers (IEEE)

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Design, Analysis and Control of a Fast Nanopositioning Stage

Abstract

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