This paper presents a controller design to compensate the effects of time delay in a flexure-based piezoelectric stack driven nanopositioner. The effects of the time delay in flexure nanopositioners is illustrated and identified by means of experimentally obtaining the frequency response of the system. Moreover, a theoretical model which takes into account the dependence between the sampling time and the delay introduced is proposed. The proposed control design methodology not only accommodates for time delay but also ensures the robust stability and allows its application to systems with a larger delay than other schemes proposed previously. Limitations and future work are discussed.
This paper was sponsored by the Spanish FPU12/00984 Program (Ministerio de Educacion, Cultura y Deporte). It was also sponsored by the Spanish Government Research Program with the Project DPI2012-37062-CO2-01 (Ministerio de Economia y Competitividad) and by the European Social Fund.
- high-speed atomic force microscope
- flexure guided nanopositioner
- piezoelectric actuators
- positive velocity and position feedback
- active vibration control
- time delay