A robust loop-shaping approach to fast and accurate nanopositioning

Sumeet S. Aphale; Antoine Ferreira; S.O. Reza Moheimani

doi:10.1016/j.sna.2013.10.006

A robust loop-shaping approach to fast and accurate nanopositioning

Sumeet S. Aphale, Antoine Ferreira, S.O. Reza Moheimani

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Abstract

Inherent nonlinearities as well as their sharp lightly-damped resonant mode severely limit the positioning bandwidth of commercially available piezoelectric stack actuated nanopositioners. In this paper, we propose a hybrid control scheme that incorporates a $H_{\infty}$-based loop-shaping control scheme for resonance damping and an integral control for tracking. Experimental raster scans recorded in both open-loop and closed-loop operation are presented to show the substantial increase in positioning performance achieved by the implemented control scheme. It is also shown that the control scheme is robust under relatively large changes in platform resonance, an effect of platform loading.

Original language	English
Pages (from-to)	88-96
Number of pages	9
Journal	Sensors and Actuators: A. Physical
Volume	204
Early online date	24 Oct 2013
DOIs	https://doi.org/10.1016/j.sna.2013.10.006
Publication status	Published - 15 Dec 2013

Keywords

Nanopositioning
H-infinity loop shaping
resonance damping
tracking
rastering

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10.1016/j.sna.2013.10.006

SNA_2013
NOTICE: this is the author’s version of a work that was accepted for publication in Sensors and Actuators: A. Physical. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published IN SENSORS AND ACTUATORS: A. PHYSICAL, [VOL 204, (2013)] DOI: 10.1016/j.sna.2013.10.006
Submitted manuscript, 0.99 MB

http://authors.elsevier.com/sd/article/S0924424713004901

Cite this

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title = "A robust loop-shaping approach to fast and accurate nanopositioning",

abstract = "Inherent nonlinearities as well as their sharp lightly-damped resonant mode severely limit the positioning bandwidth of commercially available piezoelectric stack actuated nanopositioners. In this paper, we propose a hybrid control scheme that incorporates a $H_{\infty}$-based loop-shaping control scheme for resonance damping and an integral control for tracking. Experimental raster scans recorded in both open-loop and closed-loop operation are presented to show the substantial increase in positioning performance achieved by the implemented control scheme. It is also shown that the control scheme is robust under relatively large changes in platform resonance, an effect of platform loading.",

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AU - Ferreira, Antoine

AU - Moheimani, S.O. Reza

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Y1 - 2013/12/15

N2 - Inherent nonlinearities as well as their sharp lightly-damped resonant mode severely limit the positioning bandwidth of commercially available piezoelectric stack actuated nanopositioners. In this paper, we propose a hybrid control scheme that incorporates a $H_{\infty}$-based loop-shaping control scheme for resonance damping and an integral control for tracking. Experimental raster scans recorded in both open-loop and closed-loop operation are presented to show the substantial increase in positioning performance achieved by the implemented control scheme. It is also shown that the control scheme is robust under relatively large changes in platform resonance, an effect of platform loading.

AB - Inherent nonlinearities as well as their sharp lightly-damped resonant mode severely limit the positioning bandwidth of commercially available piezoelectric stack actuated nanopositioners. In this paper, we propose a hybrid control scheme that incorporates a $H_{\infty}$-based loop-shaping control scheme for resonance damping and an integral control for tracking. Experimental raster scans recorded in both open-loop and closed-loop operation are presented to show the substantial increase in positioning performance achieved by the implemented control scheme. It is also shown that the control scheme is robust under relatively large changes in platform resonance, an effect of platform loading.

KW - Nanopositioning

KW - H-infinity loop shaping

KW - resonance damping

KW - tracking

KW - rastering

U2 - 10.1016/j.sna.2013.10.006

DO - 10.1016/j.sna.2013.10.006

M3 - Article

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EP - 96

JO - Sensors and Actuators: A. Physical

JF - Sensors and Actuators: A. Physical

ER -

A robust loop-shaping approach to fast and accurate nanopositioning

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Keywords

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