Fractional Repetitive Control of Nanopositioning Stages for High-Speed Scanning Using Low-Pass FIR Variable Fractional Delay Filter

Linlin Li, Zaozao Chen, Sumeet S. Aphale, LiMin Zhu*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

21 Citations (Scopus)
5 Downloads (Pure)

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Engineering & Materials Science