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Evolution of a Surface-Roughness Spectrum Caused by Stress in Nanometer-Scale Chemical Etching
K.-S. Kim, J. A. Hurtado,
H. Tan
Engineering
Brown University
Research output
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Contribution to journal
›
Article
›
peer-review
80
Citations (Scopus)
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Dive into the research topics of 'Evolution of a Surface-Roughness Spectrum Caused by Stress in Nanometer-Scale Chemical Etching'. Together they form a unique fingerprint.
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Keyphrases
Roughness Spectrum
100%
Chemical Etching
100%
High-frequency Decay
33%
Material Science
Surface Roughness
100%
Surface (Surface Science)
50%
Aluminum
50%
Engineering
Measure Stress
50%