Abstract
A novel fast terminal sliding mode controller is proposed in this work for high-performance trajectory tracking at the nanometer scales. It combines a recursive integer-order non-singular high-order sliding manifold and a fractional-order fast fixed-time reaching law to ensure globally fast convergence, and adopts a time-delay-estimation based disturbance estimator deeming the designed controller robust to parameter uncertainty. The stability of the designed controller is verified through the Lyapunov framework, where the full analyses of convergence region and settling time are also presented. The tracking performance is experimentally verified on a piezo-stack-driven nano-positioning platform.
Original language | English |
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Pages (from-to) | 4313-4318 |
Number of pages | 6 |
Journal | IFAC-PapersOnLine |
Volume | 56 |
Issue number | 2 |
Early online date | 22 Nov 2023 |
DOIs | |
Publication status | Published - 2023 |
Event | IFAC World Congress 2023 - PACIFICO Yokohama, Yokohama, Japan Duration: 9 Jul 2023 → 14 Jul 2023 Conference number: 22 https://www.ifac2023.org/ |
Keywords
- high-order sliding mode
- fractional calculus
- fast fixed-time convergence
- time delay estimation
- nanopositioning